Surface contamination detection
US7397560B2 · kind B2 · utility
4Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Aug 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/94
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contamination detector in accordance with one embodiment of the invention includes a plasma generation system operable to direct an atmospheric plasma discharge towards a surface. The contamination detector further includes a light capture system to capture light generated by interaction of the atmospheric plasma discharge with the surface. The light capture system guides the captured light to an optical detection system configured to detect a contaminant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.