Piezoelectric element, ink jet recording head and producing method for piezoelectric element
US7399066B2 · kind B2 · utility
1Cited by
7References
11Claims
0Family size
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Key dates
| Filing date | Aug 30, 2004 |
| Grant date | Jul 15, 2008 |
| Priority date | — |
| Expiry date | Feb 28, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/877
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric element including a vibrating plate, a lower electrode, a piezoelectric film and an upper electrode laminated in this order, wherein the lower electrode, the upper electrode and the piezoelectric film are formed by a perovskite type oxide while the vibrating plate is formed by a metal oxide, and a junction interface is substantially absent between the vibrating plate and the lower electrode, between the lower electrode and the piezoelectric film and between the piezoelectric film and the upper electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.