Anodically bonded cell, method for making same and systems incorporating same

US7400207B2 · kind B2 · utility

Assignee

• Sarnoff Corporation · US

Inventors

• Steven Lipp · Cranbury, US
• Joseph H. Abeles · East Brunswick Township, US
• Alan Michael Braun · Lawrenceville, US
• Sterling Eduard McBride · Lawrenceville, US
• John P. Riganati · Yorba Linda, US
• Ralph Whaley · Princeton Junction, US
• Peter John Zanzucchi · Lawrenceville, US

Key dates

• Filing date: Jan 5, 2005
• Grant date: Jul 15, 2008
• Expiry date: Sep 30, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G04F5/14
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A cell suitable for use with an atomic clock and a method for making the same, the cell including: a silicon wafer having a recess formed therein; at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon sealing the recess; and, an alkali metal containing component and buffer gas contained in the recess. The method includes: providing a silicon wafer; forming a cavity through the silicon wafer; introducing an alkali metal containing component and buffer gas into the cavity; and, anodically bonding at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon to the wafer to close the cavity.