Stress relieved flat frame for DMD window

US7402458B2 · kind B2 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Bradley Morgan Haskett · Allen, US
• John P. O'Connor · Wellesley, US
• Steven Edward Smith · Coppell, US
• Mark Myron Miller · Plano, US
• Ivan Kmecko · Plano, US
• Jwei Liu · Plano, US
• Edward Fisher · Rocky Hill, US
• Frank Armstrong · Lubbock, US
• Daniel C. Estabrook · Plano, US
• Jeffrey E. Faris · Richardson, US

Key dates

• Filing date: Apr 28, 2005
• Grant date: Jul 22, 2008
• Expiry date: Mar 16, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2224/49175
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An improved window frame and window piece for a micromirror assembly is disclosed herein. The window frame includes a stress-relieving contour positioned in the middle of the frame that can absorb the mechanical stresses applied to the window frame from the ceramic base and from the window piece. The window frame may be comprised of a single piece of sheet metal that has been stamped to include a stress-relieving contour. The stress-relieving contour may be comprised of a variety of shapes, including a “U” shape, an inverted “U” shape, a curved step shape, or other combinations thereof.