Patent · US Expired

Parallel, individually addressable probes for nanolithography

US7402849B2 · kind B2 · utility

4Cited by

3References

5Claims

0Family size

Assignee

The Board of Trustees of the University of Illinois · US

Inventors

Chang Liu · Champaign, US
Ming Zhang · Beijing, CN
David Bullen · Ottawa, CA

Key dates

Filing date	Mar 7, 2005
Grant date	Jul 22, 2008
Priority date	—
Expiry date	Jul 13, 2025

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/874
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.