Sensing element used in sensing device for sensing target substance in specimen by using plasmon resonance
US7403287B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2006 |
| Grant date | Jul 22, 2008 |
| Priority date | — |
| Expiry date | Nov 8, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/554
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of producing a sensing element used in a detecting device for detecting a target substance in a specimen with the use of plasmon resonance. The method includes the steps of forming an insulating layer on a substrate, the surface of the substrate having an electroconductive layer including a first electroconductive material, forming a plurality of holes through the insulating layer to form an insulating pattern, filling up the holes with a second electroconductive material to form a metallic pattern, removing the insulating pattern, and removing a region other than the region sandwiched by the metallic pattern and the substrate in the electroconductive layer, using the metallic pattern as a mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.