Probe and small sample pick up mechanism
US7404339B2 · kind B2 · utility
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28Claims
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Key dates
| Filing date | Jul 15, 2005 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Jul 2, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20264
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe mechanism and a sample pick up mechanism of the invention are provided at an observing apparatus or an analyzing apparatus and characterized in including a tip member comprising a needle-like member brought into contact with a sample, including a driving electrostatic actuator and means for monitoring a change in an electrostatic capacitance between electrodes of the electrostatic actuator, and capable of sensing that the probe is brought into contact with a sample by the monitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.