Method for calibration and removal of wavefront errors
US7405833B2 · kind B2 · utility
12Cited by
16References
10Claims
0Family size
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Key dates
| Filing date | Nov 3, 2005 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Aug 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and methods for generating an empirically determined mathematical model of wavefront error in an interferometer as a function of aperture misalignment and then applying the model to correct subsequent measurements. The methods are useful in Fizeau and other types of interferometers in which carrier fringe analysis may be used for reducing errors caused by environmental and vibration effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.