Spatial light modulator having a cantilever anti-stiction mechanism
US7405862B2 · kind B2 · utility
3Cited by
1References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2006 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Nov 8, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower portion of the mirror plate. The mirror plate can tilt around a hinge component extending into the first cavity. The hinge component is supported by a stationary substrate. The tilt movement of the mirror plate can be stopped when the cantilever comes to contact with a stationary object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.