Efficient EUV collector designs
US7405871B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 8, 2005 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Jun 16, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and raveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.