Method for manufacturing a piezoelectric resonator
US7406756B2 · kind B2 · utility
0Cited by
9References
3Claims
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Key dates
| Filing date | Oct 21, 2004 |
| Grant date | Aug 5, 2008 |
| Priority date | — |
| Expiry date | Dec 28, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.