Method and system for high-speed, precise micromachining an array of devices

US7407861B2 · kind B2 · utility

Assignee

• The GSI Group, LLC · US

Inventors

• Bruce L. Couch · Attleboro, US
• Jonathan S. Ehrmann · Sudbury, US
• Yun Fee Chu · Natick, US
• Joseph V. Lento · Methuen, US
• Shepard D. Johnson · Andover, US

Key dates

• Filing date: May 18, 2005
• Grant date: Aug 5, 2008
• Expiry date: Mar 11, 2026

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K2103/50
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.