Nanostructures, nanogrooves, and nanowires
US7407887B2 · kind B2 · utility
54Cited by
3References
15Claims
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Key dates
| Filing date | Oct 14, 2004 |
| Grant date | Aug 5, 2008 |
| Priority date | — |
| Expiry date | May 8, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/288
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Compositions and methods for making nanostructures and nanowires on substrates, including but not limited to metal-semiconductor nanostructures and semiconductor nanowires on semiconductor substrates. Particularly described are methods for making cobalt silicide nanostructures on silicon substrates and for making silicon nanowires on silicon substrates using cobalt nanoparticles. Nanogrooves and methods of making nanogrooves. Methods of making silanes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.