Patent · US Active

Nanoelectromechanical and microelectromechanical sensors and analyzers

US7408147B2 · kind B2 · utility

21Cited by
1References
59Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 26, 2006
Grant dateAug 5, 2008
Priority date
Expiry dateJan 30, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2329/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention provides methods, devices and device components for detecting, sensing and analyzing molecules. Detectors of the present invention provide good detection sensitivity over a wide range of molecular masses ranging from a few Daltons up to 10s of megadaltons, which does not decrease as function of molecular mass. Sensors and analyzers of the present invention detect emission from an array of resonators to determine the molecular masses and/or electric charges of molecules which impact or contact an external surface of a membrane that is used to mount and excite the resonators in the array. Resonators in the array are excited via piezoelectric and/or magnetic excitation of the mounting membrane and, optionally, grid electrodes are used in certain configurations for electrically biasing for the resonator array, and for amplification or suppression of emission from the resonators so as to provide detection and mass/electric charge analysis with good sensitivity and resolution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.