Power supply unit for gas discharge processes
US7408329B2 · kind B2 · utility
36Cited by
15References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2005 |
| Grant date | Aug 5, 2008 |
| Priority date | — |
| Expiry date | Jul 14, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.