Patent · US Active

Monolithic translation stage device

US7409118B2 · kind B2 · utility

7Cited by
4References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2006
Grant dateAug 5, 2008
Priority date
Expiry dateJan 4, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/3596
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A monolithic device for determining a translation, the monolithic device being fabricated from a single continuous piece of a glass substrate. The monolithic device comprises at least one frame, a moving platform linked to the at least one frame and an optical transducer. The at least one frame is fabricated from the glass substrate. The moving platform is fabricated from the glass substrate, wherein the moving platform is linked to the at least one frame via at least one elastic hinge. The at least one elastic hinge is also fabricated from the glass substrate. The optical transducer is imbedded into the moving platform and the at least one frame.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.