MEMS passivation with phosphonate surfactants
US7410820B2 · kind B2 · utility
6Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | Jan 5, 2005 |
| Grant date | Aug 12, 2008 |
| Priority date | — |
| Expiry date | Nov 11, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y30/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.