Vertical unipolar component periphery
US7411248B2 · kind B2 · utility
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4References
2Claims
0Family size
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Key dates
| Filing date | Dec 8, 2005 |
| Grant date | Aug 12, 2008 |
| Priority date | — |
| Expiry date | May 17, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/117
Abstract
A vertical unipolar component formed in a semiconductor substrate, comprising vertical fingers made of a conductive material surrounded with silicon oxide, portions of the substrate being present between the fingers and the assembly being coated with a conductive layer. The component periphery includes a succession of fingers arranged in concentric trenches, separated from one another by silicon oxide only, the upper surface of the fingers of at least the innermost rank being in contact with said conductive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.