Method of making pressure transducer and apparatus
US7412892B1 · kind B1 · utility
2Cited by
44References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 6, 2007 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | Jun 6, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0055
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for making a pressure transducer comprising: forming a recess in a diaphragm, the diaphragm having a thinned region that deflects responsively to pressure being applied thereto; depositing a glass frit in the recess; embedding a plurality of strain gages in the glass frit; and, wire bonding the strain gages into a Wheatstone bridge configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.