Crystal base plate and pressing device
US7413430B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2003 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | Aug 28, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/3558
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The upper block 12 contacts the bearing block 20, and the bearing block 20 is coupled to the upper plate 21. The upper block 12 has a protruding part 22 on the upper surface that is worked into a convex surface with a radius of R1, and the bearing block 20 has a recessed part 23 in the undersurface that is worked into a concave surface with a radius of R2 (R2>R1). As a result of such a construction being used, the pressing surface of the upper pressing plate 15 always conforms to the surface of the quartz crystal substrate 11 during pressing, so that a uniform load is applied to the quartz crystal substrate 11. As a result, the surface of the quartz crystal can be uniformly pressed in the hot pressing method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.