Process module tuning
US7415312B2 · kind B2 · utility
37Cited by
36References
25Claims
0Family size
Inventors
Key dates
| Filing date | May 26, 2004 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | May 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/042
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A process module tuning method characterizes a process module by gathering data using a process condition measuring device to measure process outputs while inputs are excited. The data is used to identify a dynamic process model. The dynamic process model is then be used to determine process input settings that will produce desired outputs. For multi-zone process modules, the interactions between zones may be modeled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.