Patent · US Expired

Methods for analyzing critical defects in analog integrated circuits

US7415378B2 · kind B2 · utility

1Cited by
6References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 31, 2005
Grant dateAug 19, 2008
Priority date
Expiry dateMar 6, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/311
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention provides a method for analyzing critical defects in analog integrated circuits. The method for analyzing critical defects, among other possible steps, may include fault testing a power field effect transistor (120) portion of an analog integrated circuit (115) to obtain electrical failure data. The method may further include performing an in-line optical inspection of the analog integrated circuit (115) to obtain physical defect data, and correlating the electrical failure data and physical defect data to analyze critical defects.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.