Method for fabricating micro optical elements using CMP
US7416674B2 · kind B2 · utility
6Cited by
12References
20Claims
0Family size
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Inventor
Key dates
| Filing date | Nov 8, 2001 |
| Grant date | Aug 26, 2008 |
| Priority date | — |
| Expiry date | Apr 23, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C15/00
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A technique for fabricating the required surface shapes for micro optical elements, such as curved micro mirrors and lenses, starts with a simple, binary for example, approximation to the desired surface shape. Then polishing, e.g., chemical mechanical polishing (CMP), is used to form the smooth optical surface. Specifically, starting with a mesa or blind hole, with a mesa profile, a smooth mirror or lens structure is fabricated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.