Probe cards employing probes having retaining portions for potting in a retention arrangement
US7417447B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 15, 2008 |
| Grant date | Aug 26, 2008 |
| Priority date | — |
| Expiry date | Jan 15, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method and apparatus using a retention arrangement with a potting enclosure for holding a plurality of probes by their retention portions, the probes being of the type having contacting tips for establishing electrical contact with pads or bumps of a device under test (DUT) to perform an electrical test. The retention arrangement has a top plate with top openings for the probes, a bottom plate with bottom openings for the probes, the plates being preferably made of ceramic with laser-machined openings, and a potting enclosure between the plates for admitting a potting agent that upon curing pots the retaining portions of the probes. In some embodiments a spacer is positioned between the top and bottom plates for defining the potting enclosure. Alternatively, the retention arrangement has intermediate plates located in the potting enclosure and having probe guiding openings to guide the probes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.