Modulation circuit with integrated microelectro-mechanical system (MEMS) components
US7417511B2 · kind B2 · utility
1Cited by
7References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 13, 2004 |
| Grant date | Aug 26, 2008 |
| Priority date | — |
| Expiry date | Mar 2, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03C3/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A modulation circuit includes a microelectronic electromechanical system (MEMS) based resonant structure having a resonant frequency, an excitation input and an output. A control module is coupled to the excitation input of the MEMS based resonant structure. The control module modifies resonant characteristics of the MEMS based resonant structure to modulate the resonant frequency of the MEMS based resonant structure to produce a modulated signal at the output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.