Deposition system and method
US7419532B2 · kind B2 · utility
61Cited by
104References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2006 |
| Grant date | Sep 2, 2008 |
| Priority date | — |
| Expiry date | Jul 13, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02T10/40
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
According to an exemplary embodiment of the present disclosure, a method of loading a filtering device includes measuring a metric indicative of an initial loading of the filtering device and desirably positioning a quantity of matter proximate the filtering device. The method also includes applying a negative pressure to the filtering device such that at least a portion of the quantity of matter is drawn into the filtering device. The method further includes measuring a metric indicative of a final loading of the filtering device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.