Patent · US Active

Scanning probe characterization of surfaces

US7420106B2 · kind B2 · utility

2Cited by

20References

25Claims

0Family size

Assignee

University of Utah Research Foundation · US

Inventors

Clayton C. Williams · Salt Lake City, US
Ezra Bussmann · Albuquerque, US

Key dates

Filing date	Mar 15, 2006
Grant date	Sep 2, 2008
Priority date	—
Expiry date	Aug 9, 2026

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/864
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator modulates the mechanical actuator and the atomic force probe at the resonant frequency of the atomic force probe. An electrical modulator is connected to the atomic force probe. A feedback sensing circuit is connected to the mechanical modulator to detect movement of the atomic force probe and provide information about the movement of the atomic force probe to the mechanical modulator allowing the mechanical modulator to modulate the atomic force probe at the resonant frequency of the atomic force probe as the resonant frequency of the atomic force probe changes. An FM detector is connected to the feedback circuit detects changes in the resonant frequency of the atomic force probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.