Discharge radiation source, in particular UV radiation
US7420191B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 27, 2003 |
| Grant date | Sep 2, 2008 |
| Priority date | — |
| Expiry date | Jan 28, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J61/526
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas input conduit (30) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit (30) is supplied with gas by a gas supply conduit (32), designed to form between its portion (42) connected to the gas input conduit (30) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit (30).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.