Internal pressure simulator for pressure sensors
US7421903B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Oct 25, 2006 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Nov 10, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In oil-filled pressure sensors, the measured pressure is applied to a compliant isolation diaphragm, which causes the pressure of the internal oil to increase until it equals the external pressure. The pressure is sensed by a pressure sensing capsule, such as a MEMS piezoresistive pressure sensor. The invention incorporates an electromagnetic force generator, such as a coil and a magnetic core, within the pressure sensor in order to generate simulated pressure. When the coil is energized, the electromagnetic field creates a uniform distributed force, which moves the isolation diaphragm directly, or via an external flexure, in a manner to cause the pressure of the internal oil to increase, which is sensed by the pressure sensing capsule, which responds by producing an output signal proportional to the electromagnetic force. The simulated pressure is employed in order to perform sensor operation monitoring and self-calibration via measurement of the output signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.