Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method
US7422198B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 27, 2006 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Nov 27, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S261/65
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.