Gas transmitter with selective gas permeable surfaces
US7422627B2 · kind B2 · utility
3Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 14, 2002 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Mar 28, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas transmitter having selective gas permeable surfaces includes a support disc that is provided with a plurality of through openings. The support disc is made from a semiconductor material. The transmitter further includes a membrane covering the openings in the support disc thereby forming the selective gas permeable surfaces and further controls the temperature of the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.