Method for preparing chemical adsorption film and solution for preparing chemical adsorption film used in the method
US7422642B2 · kind B2 · utility
1Cited by
3References
12Claims
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Key dates
| Filing date | Mar 12, 2003 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Nov 3, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/113
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
To provide a method which allows the combination of rapid formation of a chemical adsorption film with the preparation of the film which is reduced in the content of impurities and having a dense structure. A method for preparing a chemical adsorption film on the surface of a substrate containing an active hydrogen, characterized in that it includes treating a metal based surfactant having at least one hydrolyzable group with a metal oxide or a partially hydrolyzed product from a metal alkoxide and water in an organic solvent to form a solution, and contacting the solution with the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.