Aluminum nitride sintered body, semiconductor manufacturing member, and method of manufacturing aluminum nitride sintered body
US7422992B2 · kind B2 · utility
3Cited by
3References
6Claims
0Family size
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Key dates
| Filing date | Mar 17, 2006 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Aug 30, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/9661
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An aluminum nitride sintered body is provided, which essentially contains aluminum nitride, 0.4 to 2.5 wt % magnesium and 2.0 to 5.0 wt % yttrium. The aluminum nitride sintered body has an average particle size of not more than 1.0 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.