Electronic detection device and detector comprising such a device
US7423270B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 21, 2007 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Aug 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This electronic detection device comprises a substrate and at least one microstructure, said microstructure comprising a membrane which extends substantially facing and at a distance from said substrate, said membrane being mechanically attached and electrically connected to at least one longilineal retention element which is mechanically and electrically connected to said substrate via at least one post. The device also comprises at least one stiffener element extending over at least one of the main faces of said microstructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.