Rugged fabry-perot pressure sensor
US7423762B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 1, 2004 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Jan 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor (100) and system for measuring pressure changes, especially in harsh environments, is described. The pressure sensor has a Fabry-Perot optical cavity formed within a tube (115) with a partial reflective mirror (130) provided by an end of an optical fiber (105) and a reflective mirror (135) provided by an end of a plug (120), with a gap (125) formed between. The pressure sensor may be disposed within a sensing chamber of a housing having an opening into the environment to be monitored. Alternatively, an isolator means may be used to isolate the sensor from the environment while communicating pressure changes to the sensing chamber. In another embodiment, the sensing chamber is filled with a compressible non-flowing material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.