Integrated interference scanning method
US7423764B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2006 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Jul 12, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated interference scanning method, mainly used to integrate the respective advantages of VSI and PSI measurements, hereby achieving the characteristic of high precision and limitless measurement range. In particular, the slope correction factor and the displacement correction factor between the VSI measurement and PSI measurement may be utilized to execute the integration calculation of the height data arrays of the VSI and PSI, so that the scanning procedure may be achieved through merely using the wideband light source of the interference scanning system, as such reducing the errors and complexity of the interference scanning system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.