Device and method for stacked multi-level uncoupled electrostatic actuators
US7423794B2 · kind B2 · utility
6Cited by
9References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 15, 2004 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Sep 27, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/201
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.