Addressing circuit and method for bi-directional micro-mirror array
US7423798B2 · kind B2 · utility
2Cited by
19References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 16, 2006 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Oct 31, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an addressing electrode under the mirror plate on opposite sides of a pivot point of the mirror hinge, a pair of micro landing tips, a single CMOS transistor electrically connected to a storage capacitor, and a word-line/bit-line interconnection structure for communicating signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.