Method of fabricating a multi-post structures on a substrate
US7425465B2 · kind B2 · utility
5Cited by
7References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 15, 2006 |
| Grant date | Sep 16, 2008 |
| Priority date | — |
| Expiry date | Dec 2, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/036
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Micromechanical devices having complex multilayer structures and techniques for forming the devices are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.