Anode layer particle beam device
US7425710B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2005 |
| Grant date | Sep 16, 2008 |
| Priority date | — |
| Expiry date | Jan 12, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13378
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An anode layer particle beam device includes a base, at least an anode placed on top of the base, an insulation layer set between the anode and the base, at least one magnetic pole, made of magnetic and conductive material and can be used as a cathode, an electric discharge channel, positioned between the anode and the magnetic pole, and an insulating material, placed in the electric discharge channel to serve as an insulator between the anode and the magnetic pole. The magnetic pole is positioned on top of the base and on an somewhat elevated outer periphery of the aforementioned anode (with the center of the later also as its center). An orifice is also set on the radiation path of the anode. Accordingly, a process gas stream can be directed into the electric discharge channel and, after being applied with a biased electric field, with the aide of the anode and the magnetic pole device, a particle beam can be generated and radiated out of the channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.