Patent · US Active

MEMS scanning mirror with tunable natural frequency

US7426066B2 · kind B2 · utility

2Cited by
7References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 14, 2005
Grant dateSep 16, 2008
Priority date—
Expiry dateOct 3, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/0841
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.