Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor
US7426861B2 · kind B2 · utility
7Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2005 |
| Grant date | Sep 23, 2008 |
| Priority date | — |
| Expiry date | Feb 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.