Integrated electron beam tip and sample heating device for a scanning tunneling microscope
US7427755B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2006 |
| Grant date | Sep 23, 2008 |
| Priority date | — |
| Expiry date | Jan 24, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electron beam heating device with the temperature up to 2200 K is provided for heating a sample and a tip for a scanning tunneling microscope (STM). The electron beam heating device includes a base stage for mating respectively with an electron beam sample heating carrier and an electron beam tip heating carrier, both carriers include a filament. The integration of the filament into the transferable electron beam sample heating carrier and electron beam tip heating carrier enables filament exchange without venting the vacuum system. A fixed distance between the sample and the filament enables reproducible sample temperature control and the filament is mounted at a back of the sample, allowing optical access for temperature measurement, and allowing sample preparation processes without changing positions of the sample or the filament. Once the tip is loaded, a fixed relative position between the tip and the filament enables reproducible control of heating. A tip holder includes an electrically isolated post connected to the tip, enabling a separate electrical potential to be applied to the tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.