Film-bulk acoustic wave resonator with motion plate and method
US7427819B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2005 |
| Grant date | Sep 23, 2008 |
| Priority date | — |
| Expiry date | Mar 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.