Substrate transferring apparatus
US7428959B2 · kind B2 · utility
13Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2006 |
| Grant date | Sep 30, 2008 |
| Priority date | — |
| Expiry date | Apr 12, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67787
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Disclosed herein is a substrate transferring apparatus. The apparatus comprises air injection modules, which serve to float a substrate, and can be independently attached to or detached from the substrate transferring apparatus. Thus, even if any one of the air injection modules is damaged, the substrate is prevented from falling because other air injection modules serve to continuously float the substrate. Furthermore, with such a construction, the air injection modules have an advantage in view of maintenance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.