Method and sample for radiation microscopy including a particle beam channel formed in the sample source
US7429733B2 · kind B2 · utility
3Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2005 |
| Grant date | Sep 30, 2008 |
| Priority date | — |
| Expiry date | Nov 25, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and sample for radiation microscopy include a sample source that includes an area of interest, an outer side of a sample formed in the sample source adjacent to the area of interest, an inner side of the sample formed inside the sample source wherein at least a portion of the area of interest is included between the inner side of the sample and the outer side, and a particle beam channel formed inside the sample source for conducting a particle beam to or from the inner side of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.