Articulated MEMs structures
US7432629B2 · kind B2 · utility
7Cited by
44References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2006 |
| Grant date | Oct 7, 2008 |
| Priority date | — |
| Expiry date | Jun 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.