Hybrid waveguide sensor
US7433553B2 · kind B2 · utility
1Cited by
1References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2007 |
| Grant date | Oct 7, 2008 |
| Priority date | — |
| Expiry date | Aug 29, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A hybrid waveguide sensor comprises a dielectric layer having one optical signal input section formed in one end thereof and one optical signal output section formed in the other end thereof, the dielectric layer having a predetermined size of thin metal film provided therein; a polymer layer formed on and under the dielectric layer and having an opening formed to expose a portion of the dielectric layer corresponding to the thin metal film, the opening having a larger width than the thin metal film; and a receptor layer formed on a portion of the dielectric layer corresponding to the thin metal film exposed by the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.