Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes
US7434476B2 · kind B2 · utility
5Cited by
23References
22Claims
0Family size
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Key dates
| Filing date | Dec 14, 2004 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Dec 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.