Patent · US Expired

Device for the coating of objects

US7434537B2 · kind B2 · utility

1Cited by

12References

25Claims

0Family size

Assignee

Schott AG · DE

Inventors

Stephan Behle · Gau-Odernheim, DE
Lars Bewig · Bad Gandersheim, DE
Thomas Kupper · Zürich, CH
Wolfram Maring · Hamburg, DE
Christoph Mölle · Bad Gandersheim, DE
Marten Walther · Engelstadt, DE

Key dates

Filing date	Aug 7, 2002
Grant date	Oct 14, 2008
Priority date	—
Expiry date	Aug 7, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32192
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus for coating objects having a single microwave source, two or more coating chambers, and an impedance structure or a waveguide structure. The coating chambers are connected to the single microwave source. The impedance structure or waveguide structure divides the microwave energy in order to generate plasmas in the coating chambers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.